The operating principle of molybdenum boats is simple and straightforward. They are boat-shaped containers made of molybdenum that are used for high-temperature applications, typically in vacuum evaporation and sputtering processes. The molybdenum boat acts as a holder or source for the material to be evaporated or sputtered, which is heated to a high temperature causing it to evaporate from the surface of the boat. Due to its high melting point, molybdenum boats are able to withstand the high temperatures required for the evaporation process. The evaporated material condenses on a substrate, forming a thin film or coating. Molybdenum boats are designed to limit thermal gradients and ensure uniform evaporation of the material. The precise shape and dimensions of the molybdenum boat play a vital role in the uniformity and efficiency of the evaporation process.
Molybdenum boat includes the following types:
1. Flat groove molybdenum boat: Suitable for high wettability materials;
2. V-groove molybdenum boat: Suitable for low wettability materials;
3. Elliptical groove molybdenum boat: Suitable for molten materials;
4. Spherical groove molybdenum boat: Suitable for expensive materials such as gold and silver;
5. Narrow groove molybdenum boat: Such design can prevent evaporation materials from sticking to filament clips;
6. Aluminum-plating boat: Plating alumina on the surface of the boat body helps the evaporation boat resist the strongly corrosive molten materials.
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